Harvard University
Center for Nanoscale Systems
The Center for Nanoscale Systems (CNS) is a shared-use core facility at Harvard University. Our scientific focus is the study, design and fabrication of nanoscale structures and their integration into large and complex interacting systems.
New CNS Facilities at the Allston SEC
The Center for Nanoscale Systems recently opened three new facilities in the Science and Engineering Complex (SEC) at Harvard University’s Allston Campus. Our new materials characterization lab houses a diverse selection of instrumentation for analyzing hard and soft materials, including thermal, mechanical, surface, particle, and chemical characterization. Our soft lithography facility is equipped for fabricating and replicating micrometer to nanoscale features using soft elastomeric materials, either through self-assembly or replica molding. Meanwhile, the new imaging lab has two high resolution electron microscopes, along with an array of electron microscopy sample preparation tools for hard and soft materials.
Click here for more information about the tools available in our Allston and Cambridge facilities of contact info@cns.fas.harvard.edu for more information.
News
The 12th CNS-Nanofabrication Summer School
CNS Nanofabrication Team will continue offering a series of tutorials on nanofabrication technologies in this summer. Two tutorials every week will cover the fundamentals of each nanofabrication technology. The operation principles, process tips/tricks, and related frontier research and applications will be discussed. All CNS users are eligible to attend.
Certificate will be awarded to any attendee who takes more than 7 courses!!
Agenda
Jun 21 Introduction of Nanofabrication JD Deng
Jun 24 Photolithography Guixiong Zhong
Jun 28 E-beam Lithography (EBL) and beyond Yuan Lu
July 5 Advanced Laser Writing Technologies Heidelberg Ins.
July 8 Reactive Ion Etch (RIE) Ling Xie
July 12 ALE- CNS Seminar II Oxford Corp.
July 15 Thin Film Growth- (CVD-PVD-ALD) Mughees Khan
July 19 Metrology for Nanofabrication Jason Tresback
July 22 MEMS process and Packaging Guixiong Zhong
July 26 CNS Seminar III Fintech
Location and Time: 100 Geological Lecture Hall, 24 Oxford St., Cambridge MA,
02138, Tuesday/ Friday, 12:00-1:30pm, Pizza lunch is available.
The agenda may be changed according to staff’s availability.
Contact Ling Xie: lxie@cns.fas.harvard.edu; Jiangdong Deng: jdeng@cns.fas.harvard.edu
Silicon carbide modulator
New research, partly performed at the Center for Nanoscale Systems, in which the researchers design, fabricate, and demonstrate a Pockels modulator in silicon carbide can be found in a Nature Communications publication and highlighted by the Harvard School of Engineering and Applied Science.
[+MORE]New maskless aligner at CNS
We are excited to announce the arrival of our new Maskless Aligner MLA-2 at CNS. This is an advanced direct-write photolithography tool for exposing photoresist on varieties of substrate materials such as silicon, III-V, glass, diamond, ceramic, and metals etc. The tool is being used for fabrication of quantum devices, MEMS, micro-optic elements, sensors, actuators, MOEMS, and other micro-devices. The system, equipped with both pneumatic and optical focusing, has a minimum resolution of 0.6um ,and a global alignment accuracy of 500nm.
[+MORE]Events
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Summer School: Photolithography
Jun 24 12:00pm - 1:30pm
Guixiong Zhong
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Summer School: Introduction to Nanofabrication
Jun 21 12:00pm - 1:30pm
JD Deng