SEC-SMC-2

Keyence VHX-7000 Optical Microscope

NanoMaterials Facility

MAKE

Keyence

MODEL

VHX-7000

LOCATION

Allston SEC Soft Lithography 2.125

Fully capable model VHX with a manual stage, 12 megapixel camera, and fully integrated head with up to 2000x magnification. The entire head assembly can be tilted up to 90 degrees (horizontal) and can image samples from any angle in between. It includes 2D and 3D imaging and measurement, polarization, automated Z-motor, fully focused imaging, and advanced measurement software such as contamination analysis, grain analysis, automated area measurements.

Contact Jiten Narang (jnarangATfas.harvard.edu) for training on any tools in the SEC Soft Lith Lab

Hao-Yu (Greg) Lin

hlin@cns.fas.harvard.edu

primary contact

Cathleen Hallinan

cathleen_hallinan@fas.harvard.edu

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