SEC-SLF-4
Diener Plasma Cleaner
NanoMaterials Facility
MAKE
Diener electronic GmbH
MODEL
LOCATION
Allston SEC Soft Lithography 2.125
The Diener Plasma Cleaner is a general use, fully programmable, plasma cleaner with large chamber size (8” diameter and 10” depth). This system runs on pure oxygen and is mainly utilized for cleaning samples and surface activation to facilitate PDMS-PDMS or PDMS-glass bonding. Custom recipes can be programmed and saved in the system. Parameters such as pump down pressure, gas flow rate, power, and run time can be easily input using the touchscreen interface.
Contact Jiten Narang (jnarangATfas.harvard.edu) for training on any tools in the SEC Soft Lith Lab
Jiten D Narang
jnarang@fas.harvard.edu
primary contact