CNS Nanofabrication Team will continue offering a series of tutorials on nanofabrication technologies in this summer. Two tutorials every week will cover the fundamentals of each nanofabrication technology. The operation principles, process tips/tricks, and related frontier research and applications will be discussed. All CNS users are eligible to attend.
Certificate will be awarded to any attendee who takes more than 7 courses!!

Agenda
Jun 21 Introduction of Nanofabrication JD Deng
Jun 24 Photolithography Guixiong Zhong
Jun 28 E-beam Lithography (EBL) and beyond Yuan Lu
July 5 Advanced Laser Writing Technologies Heidelberg Ins.
July 8 Reactive Ion Etch (RIE) Ling Xie
July 12 ALE- CNS Seminar II Oxford Corp.
July 15 Thin Film Growth – (CVD-PVD-ALD) Mughees Khan
July 19 Die Bonding Methods and Materials – Finetech & Indium
July 22 Metrology for Nanofabrication Jason Tresback
July 26 MEMS process and Packaging Guixiong Zhong

Location and Time: 100 Geological Lecture Hall, 24 Oxford St., Cambridge MA,
02138, Tuesday/ Friday, 12:00-1:30pm, Pizza lunch is available.

The agenda may be changed according to staff’s availability.
Contact Ling Xie: lxie@cns.fas.harvard.edu; Jiangdong Deng: jdeng@cns.fas.harvard.edu