Presentations

Beyond A/B/A/B… Unorthodox Pulse Sequences in Atomic Layer Deposition

Jeffrey W. Elam - Energy Systems Division - Argonne National Laboratory - Argonne, IL, USA

11/30/2012

ALD Precursors and Reaction Mechanisms

Prof. Roy Gordon

11/30/2012

ALD at Cornell NanoScale Facility

Vince Genova

11/30/2012

Atomic Layer Deposition at Harvard CNS

Mac Hathaway

11/30/2012

Atomic Layer Deposition at the Stanford Nanofabrication Facility

J. Provine & Michelle Rincon

11/30/2012

ALD at University of Minnesota

11/30/2012

ALD Capabilities at MRC UT Austin

Marylene Palard, J. H. Yum, T. Akyol, B Fallahazad, E Tutuc, J Lee, S Banerjee

11/30/2012

ALD at Georgia Tech IEN

John Pham

11/30/2012

Atomic Layer Deposition at ASU NanoFab

S. Myhajlenko and A. Handugan

11/30/2012

ALD Nanofilm microchannel plate Technology

N. T. Sullivan

11/30/2012

ALD at Penn State

11/30/2012

Atomic Layer Deposition at UCSB

11/30/2012

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