Bok joined CNS in January 2022 as a photolithography engineer. He has expertise in photolithography and 3D printing. Before joining CNS, he worked in the Lewis group at Harvard for 15 years, focusing on ink synthesis and 3D printing for applications in printed electronics, 3D micro-architectures, and batteries.
David is a Professor of Applied Physics in the Practice of Electron Microscopy at the School of Engineering and Applied Sciences at Harvard University. He is the lead for the Imaging and Analysis facility at the CNS. Professor Bell received his doctorate in physics from the University of Melbourne and did his postdoctoral study at MIT. His research focuses on theory and application of aberration-corrected and analytical electron microscopy, with particular emphasis on the application of aberration corrected low voltage electron microscopy.
Tim Cavanaugh is an Imaging Engineer responsible for the training and care of FE-SEMs at CNS. Tim has a background in geology and previously worked in the energy industry, specializing in imaging of geological samples and modelling fluid flow through tight reservoir systems.
Maureen Daniels is the Administrative Coordinator for CNS. She joined the CNS administrative team in October 2007. She made the transition to CNS from Harvard’s EH&S Department where she worked since 2003 in a similar administrative role. Her primary duties include, procurement, marketing, event planning, parking coordination, and facility access coordination.
JD is the lead for Nanofabrication facility and Scanning Probe Microscope group at the CNS. Dr. Deng received his first doctorate in physics from Nankai University in China, then the second Ph. D degree in Electrical Engineering from Virginia Tech. (VT). After working as a project manager in a nanotechnology industry for 3 years, he joined CNS in 2004 as principal scientist. His current research interests include various nanofabrication technologies, especially advanced lithography and process integration, photonic/ electronic sensor structures, MEMs/NEMs device, and Scanning Probe Microscopy (SPM)-based nano-characterization technologies.
Kevin Edwards is the Financial Associate of CNS and is responsible for service center facilities billing, monthly reconciliations, and travel reimbursement, and assists with support of the user program.
Adam Graham supports the imaging and analysis team within CNS. He specializes in Cryo SEM, Cryo Sample preparation, high resolution TEM, and Aberration corrected TEM. Adam provides training, application support, and assisted work as needed for CNS users. Before coming to CNS, Adam Supported the electron microscopy industry, performing sales installations, training, applications support, and service to the global community.
Equipment Engineer. 30 years experience in semiconductor equipment support, maintenance and manufacturing. Areas of expertise are Etch, PECVD, PVD. Education in computers, electronics and electrical construction.
Greg specializes in device fabrication, surface analysis using XPS and material characterization using XRF and X-ray microCT imaging. He has performed research in academic and industrial settings on a variety of device platform including carbon nanotube memory, flexible printable electronics, optical chemical sensors, on-demand bioadhesive, silicon nanowire for radiation detection and microfluidic devices.
Yuan Lu is in charge of all the e-beam lithography.
Training, up-keep, and operating of these four e-beam tools: Elionix F-125 –125 kV, 4nm minimum feature size and up to 8 inch sample size; Elionix 7000 -- 100kV, 10nm minimum feature size and up to 8 inch sample size; Raith 150 -- 30 kV, 30nm minimum feature size and up to 4 inch sample size; and Jeol 7000F -- 30 kV, 30nm minimum feature size and with mechanical stage.
Ed is an engineer in the Nanofabrication Group (cleanroom). His focus is on Physical Vapor Deposition (PVD) systems and processes, including thermal and electron beam evaporation as well as sputtering. He earned his bachelor’s degree in Mechanical Engineering at Northeastern University. Prior to CNS, Ed has worked as a mechanic, machinist, draftsman and various other jobs. In his spare time he rides motorcycles and meddles about in his garage machine shop.
Arthur specializes in optical microscopy and spectroscopy techniques including: confocal, fluorescence, phase contrast, live cell, DIC, CARS, SRS, TPF, SHG, TIRF, and FTIR, Raman, and PL spectroscopy.
Steve has a long history of semiconductor equipment engineering starting in the late 70’s as a mechanical assembler for Plasma- Therm and progressing to field service for equipment manufacturers to supporting 24/7 semiconductor fabs. Steve’s expertise is in vacuum equipment, thermal processing, wet chemical systems, and gas handling equipment. Steve manages all equipment moves and installations in the Nanofab and shares equipment responsibility with Dave LeFleur. In his free time, Steve does extensive research on catching striped bass in Boston harbor, repairing old furniture, and supporting his children through college and into the workforce.
Jim has worked for Harvard since August of 1996 and has held several different positions in his time at the University. He started out as a Purchaser for the UIS Department’s campus computer store, The Technology Product Center (TPC). He was promoted to Purchasing Manager in 1998. In the fall of 1999, he left UIS and took a position in Harvard’s Office for Sponsored Research (OSR), since renamed the Office for Sponsored Programs, as a Staff Assistant. In 2000, he was promoted to Research Administrator and worked on sponsored funds for several science departments within the Faculty of Arts and Sciences.
In 2001, he accepted a position in the Department of Physics to work 50% as the Lab Director of Professor Charles M. Marcus and 50% as an administrator for the then Center of Imaging and Mesoscale Structures (CIMS). In 2002, he accepted the position of CNS Administrative Manager. In August of 2007, Jim became the Administrative Director of CNS.
Currently Jim manages the CNS User Program and all aspects of the day-to-day flow of prospective and current users within CNS.
Linda oversees the general financial and administration at CNS. Before joining CNS in January 2016, she has over 20 years of experience in financial, research grants management, and departmental administration at Harvard, Mass General Hospital, UC San Diego, and Mt. Sinai Medical School. Linda holds an M.S. in Public Accounting from the Pace University with an undergraduate degree in Economics.
Nicki Watson has been an electron microscopist for over 30 years. She specializes in Biological electron microscopy imaging and sample prep, and offers special assistance and training to researchers needing this technique.
Before coming to CNS, Nicki managed the W.M.Keck Biological Imaging Facility at Whitehead Institute (1998-2019) . Nicki graduated from SDSU, spent two years working as a clinical electron microscopist at the VA Medical Center in La Jolla, California, followed by six years training with Drs. George Palade and Marilyn Farquhar at the University of California San Diego, as part of their electron microscopy core group.
Robert Westervelt received his PhD from the University of California, Berkeley in 1977. Following a postdoctoral appointment, he moved to Harvard University, where he is currently the Mallinckrodt Professor of Applied Physics and Physics. Westervelt's group images electron flow in graphene and other 2D materials using a liquid-He cooled scanning probe microscope. He is the Director of the Center for Nanoscale Systems at Harvard, which provides shared facilities for imaging, nanofabrication and characterization of quantum materials and devices. In addition, he is the PI and Director of the NSF Science and Technology Center for Integrated Quantum Materials based at Harvard University, with partners at Howard University, the Massachusetts Institute of Technology, and the Museum of Science, Boston.
Ling is a Principal Scientist specialized in nanofabrication to construct nanostructures, e.g., nanotubes, Si nanowires, and ultra-narrow (~10nm) smooth trenches in Si. Her current focus is on Reactive Ion Etch (RIE). She has collaborated with faculty groups to etch specific shapes in diamond, Si, and III-V materials. Ling received her PhD in Materials Science and Engineering and worked with Kodak on CCD image sensors and Lucent on 3D optical switches before joined CNS. She has experiences in thin film deposition and characterization. In her free time, she enjoys reading and serving her community.
Guixiong joined CNS in January 2013 as a senior process engineer. He has expertise in device fabrication, materials synthesis and characterization, and MEMS process integration. At CNS, his responsibilities include photolithography, back end packaging, and process development. He offers trainings on the i-line Stepper, Nanoscribe 3D Lithography System, Maskless Aligner MLA150, uPG501 Laser Direct Writer, Wire Bonder, Flip Chip Bonder, and the Scriber/Cleaver LSD100.
Harvard CNS
