TE-1
Key High Thermal Evaporator
Nanofabrication Facility
MAKE
Key High Vacuum Products
MODEL
N/A
LOCATION
LISE Cleanroom G07
Equipment description and usage: Key High Vacuum TE-1 is a three-source thermal evaporation system for sequentially depositing thin films by resistive heating. Film thickness is monitored by a quartz crystal monitor. Base pressures down to 2e-7 torr are achievable by cryo and oil-free roughing pumps. General purpose.
Applications: This tool is currently set up for general material depositions. Please contact staff-in-charge or primary user for the materials allowed in this system.
Features:
* Three thermal source pockets and one power supply capable of sequential thin film deposition
* Quartz crystal monitor for closed loop thickness control
* Cryopump, base pressure down to ~ 10E-7 torr
Click here to view this tool in the CNS virtual reality model.
Contact staff for training information. Please refer to the Nanofabrication Facility Use tab of the User Info section of the CNS website for the nanofab training flowchart.
Ed Macomber
eddiemac@cns.fas.harvard.edu
primary contact
David LaFleur
dlafleur@cns.fas.harvard.edu