TE-3
Sharon Thermal Evaporator TE-3
Nanofabrication Facility
MAKE
Sharon
MODEL
N/A
LOCATION
LISE Cleanroom G07
SHARON TE-3 is a four-source thermal evaporation system with one 2.5-kW power supply for sequential resistive-heated deposition. Film thickness is monitored in-situ by a quartz crystal monitor. A cryopump, backed by an oil-free roughing pump, enables base pressures down to the 10E-7 torr range. This system is a rapid turn-around machine with a typical pump down time of ~1 hour and evaporation times of several minutes. This system is currently set up for metal deposition, in particular for metal contacts. Cr, Au, Ti, Pt, Pd, Cu, Ag, and Al are the metals allowed in the system.
Click here to view this tool in the CNS virtual reality model.
If you wish to become a qualified user for this evaporator, you must contact the primary contact. Please refer to the Nanofabrication Facility Use tab of the User Info section of the CNS website for the nanofab training flowchart.
Ed Macomber
eddiemac@cns.fas.harvard.edu
primary contact
David LaFleur
dlafleur@cns.fas.harvard.edu