Equipment description and usage: SHARON TE-4 is a four-source thermal evaporation system for depositing thin films by resistive heating. The system has two 2.5-kW power supplies, each controls two deposition sources, allowing deposition of two materials at the same time. Film thicknesses for each pair of sources are monitored in-situ, respectively, by two quartz crystal monitors. A cryopump and oil-free roughing pump vacuum system allows base pressures down to ~2e-7 torr. Applications: This is system is currently set up for common use of depositing low vapor-pressure materials, magnetic or non-magnetic. Features: * Four thermal source pockets * Two 2.5 kW power supplies, capable of sequential thin film deposition * Quartz crystal monitor for closed loop thickness control * Multiple substrate holders with substrate size up to 3"" maximum * Provision of water or liquid nitrogen cooling and substrate heating up to 340 °C * Cryopump, base pressure down to ~ 2E-7 torr

Click here to view this tool in the CNS virtual reality model.