EE-4
Denton E-Beam Evaporator
Nanofabrication Facility
MAKE
Denton Vacuum
MODEL
LOCATION
LISE Cleanroom G07
Denton EE-4 is an electron beam deposition tool with a 6-position hearth capable of depositing nanoscale films of non-magnetic metals in a vacuum environment on the order of e-7 torr. EE-4 has a dual chamber design that affords the deposition materials to remain under vacuum during sample load-in. EE-4 can accommodate up to five 3"" diameter wafers, or (3) 4"" wafers, or (1) 6"" wafer, or multiple small samples/pieces of wafers on rotating substrate holders. Depositions and pump-down/venting sequences are automated utilizing an onboard PLC that synchronizes these operations. The following materials are available for use in EE-4: Au, Pt, Ag, Ti, Cr, Pd. These are the only materials available in EE-4, and are supplied by CNS.
Click here to view this tool in the CNS virtual reality model.
Contact staff for training information. Please refer to the Nanofabrication Facility Use tab of the User Info section of the CNS website for the nanofab training flowchart.
Ed Macomber
eddiemac@cns.fas.harvard.edu
primary contact
David LaFleur
dlafleur@cns.fas.harvard.edu