RIE-9
Anatech Barrel Plasma System
Nanofabrication Facility
MAKE
Anatech LTD
MODEL
SCE 106
LOCATION
LISE Cleanroom G07
The Anatech 106 oxygen plasma barrel asher is a useful tool for quickly removing thin layers of organic contamination. It is useful as a final clean after a wet-chemical photoresist removal, or as a ""de-scum"" process before a deposition process. The tool can accommodate up to 150 mm diameter substrates. The tool is nearly completely automated, with a touch-screen control panel. Maximum RF power is 300 watts, maximum O2 flow rate of 100 SCCM.
Click here to view this tool in the CNS virtual reality model.
Training is offered most weeks, in conjunction with training on the technics plasma system. Sign up is on the online training webpage. Please refer to the Nanofabrication Facility Use tab of the User Info section of the CNS website for the nanofab training flowchart.
Kenlin Huang
kenlinhuang@fas.harvard.edu
primary contact
Ling Xie
lxie@cns.fas.harvard.edu
Steve Paolini
spaolini@cns.fas.harvard.edu