CVD-13
PECVD; Diamond
Nanofabrication Facility
MAKE
Seki Diamond Systems
MODEL
AX5010-INT
LOCATION
LISE G27
Tool is fully commissioned and ready for use.
Click here to view this tool in the CNS virtual reality model.
Contact staff for training information.
Mughees Khan
mkhan@fas.harvard.edu
primary contact
Steve Paolini
spaolini@cns.fas.harvard.edu