EL-5
Elionix ELS-F125
Nanofabrication Facility
MAKE
Elionix
MODEL
ELS-F125
LOCATION
LISE Cleanroom G07
Electron Beam Lithography System
Click here to view this tool in the CNS virtual reality model.
Please refer to the Nanofabrication Facility Use tab of the User Info section of the CNS website for the nanofab training flowchart.
Yuan Lu
ylu@fas.harvard.edu
primary contact
Jiangdong Deng
jdeng@cns.fas.harvard.edu