The Hitachi SU8230 Cold Field Emission scanning electron microscope for high-resolution imaging with a small source size and energy spread. Innovative CFE Gun technology contributes the ultimate FE-SEM with superior beam brightness and stability affording high-resolution imaging. The system operates at High vacuum and is equipped with a load lock for sample exchange with out breaking vacuum. With the beam Deceleration, the system is capable of high-resolution imaging at low KV and also enables imaging of several materials with out a conducting material coating for quick fabrication process checking. The Hitachi SU8230 SEM also comes with post imaging CD measurement system which can be automated to minimize the human error for any Nanofabrication application.

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