SP-4

Sputtering System - SEM Sample Prep

Nanofabrication Facility

MAKE

PVD Products

MODEL

LOCATION

LISE Cleanroom G07

Training: SEM-10 Hitachi SU8230 is a prerequisite . Contact staff for training information.

SP-4 is a sputtering system specifically designed for Scanning Electron Microscopy (SEM) sample preparation in the CNS Nanofabrication cleanroom. The system is turbo-pumped with a small one-gun chamber. All valves and controls on SP-4 are manually activated and a clear understanding of basic vacuum technology is required. The sample is coated with Iridium material to facilitate good electrical conductance in the SEM chamber. No other materials or processes are available in SP-4, and qualification on the cleanroom SEM (SEM-10 Hitachi SU8230) is a prerequisite to SP-4 training and access. Please contact staff with questions or for training details.

Ed Macomber

eddiemac@cns.fas.harvard.edu

primary contact

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