SPM-12
Jupiter AFM
Nanofabrication Facility
MAKE
Asylum Research
MODEL
Jupiter XR
LOCATION
LISE Cleanroom G07
The Jupiter XR is a large sample AFM capable of high speed and high resolution. It comes with a full suite of electrical and mechanical property measurement modes with flexibility. It has a fully motorized stage for up to 200mm wafer with 100um X/Y piezo range and 12um for Z (height). All commercial cantilever probes are compatible up to 8MHz resonance frequency with blueDrive or AC/tapping for high speed and high resolution imaging. Roughness, step-heights, electrical (cAFM, EFM, KPFM, HV-PFM) and magnetic (MFM) properties, mechanical properties (FDC, Fmap, bimodal, AM-FM, CR), and SPM lithography can be performed in air (ambient conditions) with a thermal stage option (20C to 240C).
Click here to view this tool in the CNS virtual reality model.
Jason Tresback
jtresback@cns.fas.harvard.edu
primary contact