SEC-PL-9
Optical Interferometric Profiler
NanoMaterials Facility
MAKE
Bruker
MODEL
LOCATION
Allston SEC Materials Core LL2.226-03
The optical profilometer measures the height topography of partially or fully reflective surfaces with sub-nanometer vertical resolution. Lateral resolution is that of optical microscopy. Lateral scan area ranges from ~100 x 100 um up to ~1000 x 1000 um for single scans, or up to 150 x 150 mm with image stitching. Maximum sample height is 100 mm.
Nicholas S. Colella
colella@fas.harvard.edu
primary contact