SEC-PL-10
Dektak Contact Stylus Profiler
NanoMaterials Facility
MAKE
Bruker
MODEL
DektakXT
LOCATION
Allston SEC Soft Lithography 2.125
The DektakXT stylus contact profilometer is the latest surface profiler with high vertical resolution (5nm) with large X/Y scan range for 2d and 3d surface analysis. All-purpose step-height measurement tool for film thickness and etch-depth.
Contact Jiten Narang (jnarangATfas.harvard.edu) for training on any tools in the SEC Soft Lith Lab
Jiten D Narang
jnarang@fas.harvard.edu
primary contact