SEC-PL-10
Dektak Contact Stylus Profiler
Nanomaterials Facility
MAKE
Bruker
MODEL
DektakXT
LOCATION
Allston SEC Soft Lithography 2.125
This tool was decommissioned on 7/23/2024 per closure of the room. JR. The DektakXT stylus contact profilometer is the latest surface profiler with high vertical resolution (5nm) with large X/Y scan range for 2d and 3d surface analysis. All-purpose step-height measurement tool for film thickness and etch-depth.
Prerequisite: CNS Soft Materials Clean Room (SMCR) online training module at the Harvard Training Portal (https://trainingportalinfo.harvard.edu/)
Hao-Yu (Greg) Lin
hlin@cns.fas.harvard.edu
primary contact
Cathleen Hallinan
cathleen_hallinan@fas.harvard.edu