SEC-PL-10

Dektak Contact Stylus Profiler

Nanomaterials Facility

MAKE

Bruker

MODEL

DektakXT

LOCATION

Allston SEC Soft Lithography 2.125

This tool was decommissioned on 7/23/2024 per closure of the room. JR.    The DektakXT stylus contact profilometer is the latest surface profiler with high vertical resolution (5nm) with large X/Y scan range for 2d and 3d surface analysis. All-purpose step-height measurement tool for film thickness and etch-depth.

Prerequisite:  CNS Soft Materials Clean Room (SMCR) online training module at the Harvard Training Portal (https://trainingportalinfo.harvard.edu/)

Hao-Yu (Greg) Lin

hlin@cns.fas.harvard.edu

primary contact

Cathleen Hallinan

cathleen_hallinan@fas.harvard.edu

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