SEC-SC-8

Laurell Spin Coater

NanoMaterials Facility

MAKE

Laurell Technologies

MODEL

WS-650Mz-8NPPB

LOCATION

Allston SEC Soft Lithography 2.125

The Laurell Technologies spin coater is available for spin coating SU-8 photoresist and PDMS onto glass or silicon substrates. We have multiple vacuum chucks and adapters that allow processing substrates of various shape and size, including small fragments, up to 200mm in diameter. It can be programmed with multi-step recipes with a maximum spin speed of 12K RPM and maximum acceleration of 12K RPM/Sec.

Contact Jiten Narang (jnarangATfas.harvard.edu) for training on any tools in the SEC Soft Lith Lab

Hao-Yu (Greg) Lin

hlin@cns.fas.harvard.edu

primary contact

Cathleen Hallinan

cathleen_hallinan@fas.harvard.edu

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