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Woollam RC2 Spectroscopic Ellipsometer

Nanofabrication Facility

MAKE

J.A. Woollam

MODEL

RC2

LOCATION

LISE Cleanroom G07

The RC2 spectroscopic ellipsometer provides innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source, and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry and Mueller matrix ellipsometry.

Measurement Capabilities

• High speed data acquisition over a wide spectral range (210nm-2500nm) with small focus spot (120um) and live camera sample view.

• Standard SE: Both Psi and Delta over their full range.

• Generalized-SE: Characterize samples with complete 2x2 Jones matrix.

• Mueller matrix SE: Measure 15 normalized MM elements or all 16 un-normalized MM elements.

• Depolarization: Check sample properties that cause depolarization.

• Intensity Reflectance and Transmittance (manual mount).

• Like- and Cross-polarized Intensity: Determine pp, ss, ps and sp Reflectance or Transmittance

 

Prerequisites:  LISE Cleanroom Qualification.  Metrology Intro Training.

Jason Tresback

jtresback@cns.fas.harvard.edu

primary contact

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