CNS Seminar/Tutorial: Exposure Strategies and Capabilities of Direct Write Lithography-Heidelberg
March 22, 2026
Niels Wijnaendts van Resandt, CEO LAB14 Inc
5/9, Friday 1:30pm, LISE-303
Direct Write Lithography Systems, 10 years MLA150 Maskless Aligner.
This year the MLA150 Maskless Aligner celebrates its 10 years anniversary since its official
introduction in 2015. Harvard CNS plays a special role in the history of the MLA150 as it was the
first university in the US to install the MLA150 as a Beta site. Since then, the MLA150 has been
widely adopted in many user facilities and cleanrooms around the world.
This talk will start by showing some principal exposure strategies employed in Heidelberg
Instruments direct write lithography tools, before focusing more specifically on the MLA150, diving
into its technical details and capabilities. Niels will be Joined by Alexander Wild, the Product
Manager of the MLA150 at Heidelberg Instruments.
Bio:
Niels Wijnaendts van Resandt is the CEO of LAB14 Inc. and Genisys USA Inc. Niels received his
masterโs degree in physics from the university of Heidelberg in 1995 and has since spent most of
his career in various roles at Heidelberg Instruments including Applications Engineer, Product
Development and Business Development. Niels founded Heidelberg Instruments US office 25
years ago. Since 2022 his role is Head of Business Development at Heidelberg Instruments parent
company, LAB14 GmbH, which is the holding that owns Heidelberg Instruments, Genisys,
NanoScribe and a number of other companies that are active in micro- and nanofabrication and
surface analytics and metrology.