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Hybrid Nanolithography System combining Thermal SPM and direct laser lithography in CNS

The first NanoFrazor Explore DLS will arrive at CNS in early April 2019. Harvard is one of the beta-testing sites for the new instrument, so CNS users get the chance to exploit the advanced features as early as possible. Beta testing of the NanoFrazor Explore DLS will kick off with a webinar for prospective users, introducing the fundamentals and the possibilities of the tool. The webinar will take place on March, 27th at 10 AM EST (https://global.gotomeeting.com/join/424882261) Attendees of the webinar can sign up for training at the tool. Researchers are invited to contact the SwissLitho team with inquiries at any time to get application-specific support directly from the developers of the technology.

After the installation, the NanoFrazor Explore DLS can be used by all CNS users and on-site trainings are offered. To further strengthen the knowledge of its tSPL technology and possibilities for cutting-edge device fabrication, we also will hold a seminar/workshop on May, 2nd (with Prof. Riedo* from NYU as a key speaker).

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Robert Westervelt, Director

William L. Wilson, Executive Director

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research and education in the areas of fabrication, imaging, and characterization of nanoscale structures, across the disciplines of applied physics, biology, chemistry, electrical engineering, geology, materials science, medicine and physics.

Creating a “world-class” collaborative nanotechnology research community by providing shared instrumentation facilities and infrastructure, expert staff, synergistic meeting places, and educational opportunities conducive to productive scientific engagement.

As the New England hub of the NSF National Nanotechnology Coordinated Infrastructure (NNCI), CNS strives to be at the leading edge of science and technology, by providing world-class tools for world-class research, and by fostering a strong competitive edge for our nation’s investigators. Importantly we serve a broad, diverse, national set of users who are focused on meeting the nation’s needs in a wide range of next generation technologies.

The focus of the technical team at CNS has been to develop specialized tools, processes, instrumentation, and expertise to help design, simulate, characterize, and fabricate novel materials, nanostructures, devices, and systems, going beyond conventional approaches. We invite you to join our research community, pushing the envelope of nanoscience and nanoengineering.

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19 Dec, 2019

Research Experience for Undergraduates (REU)

Research Experience for Undergraduates (REU) opportunities at the School of Engineering and Applied Sciences (SEAS): Spend your summer at Harvard University performing cutting-edge research in world-class laboratories. Focus on an in-depth research project while exploring multidisciplinary research topics and honing your science communication skills. Participants are part of a large, diverse research community, and benefit from organized and informal interactions with students, mentors, and faculty.  We provide a focused effort for mentoring and training undergraduates in several exciting branches of science and engineering, including biomaterials, materials science, nanotechnology, robotics, computer science, and energy and the environment. We are seeking undergraduates from chemistry, physics, biology, computer science, mathematics (applied and pure), statistics, and engineering. Students without prior research experience, including freshman and sophomore students, are especially encouraged to apply.  For more information, see here.

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20 Mar, 2019

Hybrid Nanolithography System combining Thermal SPM and direct laser lithography in CNS

Thermal scanning probe lithography (tSPL) uses heated ultrasharp tips to write nanometer-scale structures by evaporating the resist. Commercialized by SwissLitho in 2014 under the name NanoFrazor, this technology has matured, and now enables researchers all over the world to avoid obstacles inherent to the conventional nanolithography tools. Many devices with novel geometries and unprecedented quality are produced using NanoFrazor, leading to interesting research results reported in many high impact publications. The NanoFrazor is a versatile tool for micro- and nanotechnology thanks to the high resolution and markerless overlay capabilities without exposing the sample to charged particle beams like electrons or ions. The NanoFrazor Explore DLS combines thermal scanning probe lithography with direct laser sublimation (DLS) – an add-on to speed up the microlithography process patterning of larger features. SwissLitho teamed up with Heidelberg Instruments to develop the integrated laser and the optics. The Harvard’s Center for Nanoscale Systems (CNS) will be the first facility to receive such a new hybrid system. CNS already has a positive experience as a beta site for new products from Heidelberg Instruments. In 2015, the CNS has acquired the MLA150, which quickly became an important workhorse for almost all users. As a result of the successful collaboration between CNS and Heidelberg, the MLA150 has been installed in many research facilities and even in production settings, replacing conventional mask aligners and eliminating the need for masks at all. What makes NanoFrazor Explorer DLS stand out, in addition to the range and precision of its operation, is in-situ imaging during the writing process and the Closed Loop Lithography approach. Thanks to that, 3-dimensional nanostructures can be implemented with single nanometer precision. Also, there is no need to use wet chemistry for resist development, or to tediously correct for proximity effects like in electron beam lithography. NanoFrazor does not require vacuum since no focussed electrons or ions are used. These characteristics make the NanoFrazor an excellent tool for nanolithography on sensitive materials, in particular, for quick and precise patterning of the sample electrodes or etch masks on nanowires or 2D materials. Besides standard resist based nanolithography the hot tip of the NanoFrazor can be used to locally heat up any surface at the nanoscale, hence triggering local chemical reactions or phase changes. The first NanoFrazor Explore DLS will arrive at CNS in early April 2019. Harvard is one of the beta-testing sites for the new instrument, so CNS users get the chance to exploit the advanced features as early as possible. Beta testing of the NanoFrazor Explore DLS will kick off with a webinar for prospective users, introducing the fundamentals and the possibilities of the tool. The webinar will take place on March, 27th at 10 AM EST (https://global.gotomeeting.com/join/424882261) Attendees of the webinar can sign up for training at the tool. Researchers are invited to contact the SwissLitho team with inquiries at any time to get application-specific support directly from the developers of the technology. After the installation, the NanoFrazor Explore DLS can be used by all CNS users and on-site trainings are offered. To further strengthen the knowledge of its tSPL technology and possibilities for cutting-edge device fabrication, we also will hold a seminar/workshop on May, 2nd (with Prof. Riedo* from NYU as a key speaker). __________________________ *Zheng et al., Nature Electronics, 2,17–25 (2019)  

March, 27th (10AM EST): Webinar NanoFrazor demo May, 2nd: Workshop/Seminar @CNS

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20 Dec, 2018

CNS 2018 Open House Poster Contest Winner

Congratulations to the winner of the 2018 CNS Open House Poster Contest: 1st Place - Xiao Yang, “Bioinspired neuron-like electronics for noninvasive brain probes”

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Events

  • Masterclass in Imaging and Materials Characterization - Webinar Series: Intro to 3D Printing with Form Labs

    May 06 12:00 pm - 1:00 pm

    Sandra Nakasone

  • Masterclass in Imaging and Materials Characterization - Webinar Series: Intro to Biological Sample Prep for EM

    Apr 29 12:00 pm - 1:00 pm

    Nicki Watson

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