The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Virtual Tour of CNS
The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
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CNS Facilities
Two sites. Three exceptional research resources.


  • ALD - Savannah ALD Training - IN PERSON - INSIDE CLEANROOM

    Jul 05 2:00 PM - 3:00 PM

    Mac Hathaway

    G-07 Cleanroom

  • CVD-14 Oxford ICP-CVD - Low Temp

    Jul 06 11:00 AM - 12:30 PM

    Mughees Khan

    CNS cleanroom - Dry processing bay at CVD-14

  • AJA SP-2 Sputtering System Training

    Jul 07 3:00 PM - 4:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom)

  • Sharon EE-3 e-beam evaporator training

    Jul 08 1:00 PM - 2:30 PM

    Ed Macomber

    We meet in the cleanroom PVD bay (last bay inside of LISE G07)

  • Disco ADA-321 Automatic Dicing Saw Training Part 1-Basic Operation

    Jul 12 2:00 PM - 3:00 PM

    Jason Tresback

    LISE G06

View Calendar


15 Jun, 2022

The 12th CNS-Nanofabrication Summer School

CNS Nanofabrication Team will continue offering a series of tutorials on nanofabrication technologies in this summer. Two tutorials every week will cover the fundamentals of each nanofabrication technology. The operation principles, process tips/tricks, and related frontier research and applications will be discussed. All CNS users are eligible to attend.
Certificate will be awarded to any attendee who takes more than 7 courses!!

Jun 21 Introduction of Nanofabrication JD Deng
Jun 24 Photolithography Guixiong Zhong
Jun 28 E-beam Lithography (EBL) and beyond Yuan Lu
July 5 Advanced Laser Writing Technologies Heidelberg Ins.
July 8 Reactive Ion Etch (RIE) Ling Xie
July 12 ALE- CNS Seminar II Oxford Corp.
July 15 Thin Film Growth - (CVD-PVD-ALD) Mughees Khan
July 19 Die Bonding Methods and Materials - Finetech & Indium
July 22 Metrology for Nanofabrication Jason Tresback
July 26 MEMS process and Packaging Guixiong Zhong

Location and Time: 100 Geological Lecture Hall, 24 Oxford St., Cambridge MA,
02138, Tuesday/ Friday, 12:00-1:30pm, Pizza lunch is available.

The agenda may be changed according to staff’s availability.
Contact Ling Xie:; Jiangdong Deng:


10 May, 2022

Silicon carbide modulator

New research, partly performed at the Center for Nanoscale Systems, in which the researchers design, fabricate, and demonstrate a Pockels modulator in silicon carbide can be found in a Nature Communications publication and highlighted by the Harvard School of Engineering and Applied Science.


10 May, 2022

New maskless aligner at CNS

We are excited to announce the arrival of our new Maskless Aligner MLA-2 at CNS. This is an advanced direct-write photolithography tool for exposing photoresist on varieties of substrate materials such as silicon, III-V, glass, diamond, ceramic, and metals etc. The tool is being used for fabrication of quantum devices, MEMS, micro-optic elements, sensors, actuators, MOEMS, and other micro-devices. The system, equipped with both pneumatic and optical focusing, has a minimum resolution of 0.6um ,and a global alignment accuracy of 500nm.


09 Mar, 2022

New RC2 spectroscopic ellipsometer

The RC2 spectroscopic ellipsometer provides innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source, and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry and Mueller matrix ellipsometry.

Measurement Capabilities

β€’ High speed data acquisition over a wide spectral range (210nm-2500nm) with small focus spot (120um) and live camera sample view.

β€’ Standard SE: Both Psi and Delta over their full range.

β€’ Generalized-SE: Characterize samples with complete 2x2 Jones matrix.

β€’ Mueller matrix SE: Measure 15 normalized MM elements or all 16 un-normalized MM elements.

β€’ Depolarization: Check sample properties that cause depolarization.

β€’ Intensity Reflectance and Transmittance (manual mount).

β€’ Like- and Cross-polarized Intensity: Determine pp, ss, ps and sp Reflectance or Transmittance


Directors Welcome

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research a


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