The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Virtual Tour of CNS
The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
CNS Facilities
Two sites. Three exceptional research resources.

Events

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  • Sharon TE-3, 4, and 5 Thermal Evaporator Training

    Jun 17 11:00 AM - 12:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom), PVD Bay

  • AB-2 RCA Cleaning Wet Process Station

    Jun 18 1:00 PM - 2:00 PM

    Bok Yeop Ahn

    G07, acid bay in the cleanroom

  • CVD-14 Oxford ICP-CVD - Low Temp

    Jun 19 11:00 AM - 12:30 PM

    Mughees Khan

    CNS cleanroom - Dry processing bay at CVD-14

  • ALD-2 GEMStar ALD Training

    Jun 20 9:00 AM - 10:00 AM

    Mughees Khan

    Wet Processing Bay - CNS cleanroom

  • Heidelberg Maskless Aligners

    Jun 21 12:30 PM - 2:30 PM

    Guixiong Zhong

    LISE G07 Nanofabrication Cleanroom (Metrology Bay)

News

19 Mar, 2024

CNS Spring Seminar Series

Semiconductor Bio-interface for DNA Data Storage Dr. Woo-Bin Jung, Harvard University

Semiconductor Bio-Interface for Functional Synaptic Connection Mapping Dr. Jung Wang, Harvard University

March 22, 2024 | 12pm – 1pm | LISE 303

About Speakers: Dr. Woo-Bin Jung and Dr. Jun Wang are postdoctoral fellows in Prof. Donhee Ham’s Lab, Harvard University.

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13 Mar, 2024

Special CNS Seminar: Three Cyclic Plasma Processes: ALE, DRIE, & ALD

Marco Volleth, Sentech Instruments GmbH

March 15, 2024 | 12pm – 1pm | LISE 303

Abstract: For some time now, plasma processes have not only been carried out
continuously, but also used in a cyclical manner. The best-known process of this type is the
so-called Bosch process for deep etching of silicon (DRIE). There is also atomic layer
deposition (ALD) for depositing very thin layers with high precision and conformality. The
equivalent etching process, called atomic layer etching (ALE), is used in more and more
applications. In the lecture, these three cyclic plasma processes will be examined in more
detail and applications will be shown using examples from SENTECH customers and our
application lab.


About Speaker: Marco Volleth studied nanotechnology with a bachelor's degree at the
Friedrich-Alexander University of Erlangen from 2013 until 2017, followed by a master's
degree in Electrical and Microsystems Engineering at the University of Applied Sciences in
Regensburg (both Germany). The main focus of his studies was in the areas of lithography
and reactive ion etching, especially for the two-material systems silicon and gallium nitride.
Since October 2020 he is working as an Application Engineer for plasma etching at
SENTECH Instruments in Berlin, Germany. SENTECH is a manufacturer of plasma process
systems and devices for thin-film metrology.

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Recent Publications

  • Highly efficient fiber to Si waveguide free-form coupler for foundry-scale silicon photonics

    Luigi Ranno, Jia Xu Brian Sia, Cosmin Popescu, Drew Weninger, Samuel Serna, Shaoliang Yu, Lionel C. Kimerling, Anuradha Agarwal, Tian Gu, and Juejun Hu

    Luigi Ranno, Jia Xu Brian Sia, Cosmin Popescu, Drew Weninger, Samuel Serna, Shaoliang Yu, Lionel C. Kimerling, Anuradha Agarwal, Tian Gu, and Juejun Hu, "Highly efficient fiber to Si waveguide free-form coupler for foundry-scale silicon photonics," Photon. Res. 12, 1055-1066 (2024)

  • Crown ether decorated silicon photonics for safeguarding against lead poisoning

    Luigi Ranno, Yong Zen Tan, Chi Siang Ong, Xin Guo, Khong Nee Koo, Xiang Li, Wanjun Wang, Samuel Serna, Chongyang Liu, Rusli, Callum G. Littlejohns, Graham T. Reed, Juejun Hu, Hong Wang & Jia Xu Brian Sia

    Ranno, L., Tan, Y.Z., Ong, C.S. et al. Crown ether decorated silicon photonics for safeguarding against lead poisoning. Nat Commun 15, 3820 (2024). https://doi.org/10.1038/s41467-024-47938-6

  • A new metamaterial for MRI-safe deep brain stimulation leads

    Francesca Marturano*, Laleh Golestanirad, Giorgio Bonmassar

    10.1109/ICEAA57318.2023.10297949

  • Scanning multiprobe microscopy for mesoscopic devices and materials: Part II

    Patrick Forrester, EliseAnne Koskelo, Yuan Cao, Pengjie Wang, Myungchul Oh, Zhuozhen Cai, Yonglong Xie, Jiachen Yu, Martin Gustafsson, Ali Yazdani, Amir Yacoby

    Bulletin of the American Physical Society, 2024

  • Scanning multiprobe microscopy for mesoscopic devices and materials: Part I

    EliseAnne Koskelo, Patrick Forrester, Yuan Cao, Pengjie Wang, Myungchul Oh, Zhuozhen Cai, Yonglong Xie, Jiachen Yu, Martin Gustafsson, Ali Yazdani, Amir Yacoby

    Bulletin of the American Physical Society, 2024

  • Reconfigurable photonic integrated circuits based on liquid-crystal-cladded slab waveguides

    Ayyoub Dehmollaian, Andrew McClung, Babak Mirzapourbeinekalaye, Amir Arbabi

    https://spie.org/photonics-west/presentation/Reconfigurable-photonic-integrated-circuits-based-on-liquid-crystal-cladded-slab/12890-52

  • Observation of Electronic Viscous Dissipation in Graphene Magneto-thermal Transport

    Jonah Waissman, Artem V Talanov, Aaron Hui, Zhongying Yan, Terry Phang, Kenji Watanabe, Takashi Taniguchi, Brian J Skinner, Philip Kim

    APS March Meeting 2024, Abstract: M07.00008

  • Ecological and phylogenetic signals in catarrhine root morphology

    Zana R. Sims

    Conference presentation, American Association of Biological Anthropologists

  • Time-stepped optical frequency comb laser design leveraging three-dimensional integration of thin-film lithium niobate and silicon CMOS

    Georgios Kyriazidis, Norman Lippok, John Davis, Xinrui (Anna) Zhu, Hana Warner, Yaowen Hu, Marko Loncar, Benjamin Vakoc, Gage Hills

    https://spie.org/photonics-west/presentation/Time-stepped-optical-frequency-comb-laser-design-leveraging-three-dimensional/12890-34

  • Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios

    Gabriel Giribaldi, Luca Colombo, Pietro Simeoni, Matteo Rinaldi

    Giribaldi, G., Colombo, L., Simeoni, P. et al. Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios. Nat Commun 15, 304 (2024). https://doi.org/10.1038/s41467-023-44038-9

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WILLIAM WILSON
EXECUTIVE DIRECTOR

Directors Welcome

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research a

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ROBERT WESTERVELT
DIRECTOR

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