Harvard University
Center for Nanoscale Systems
The Center for Nanoscale Systems (CNS) is a shared-use core facility at Harvard University. Our scientific focus is the study, design and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Hybrid Nanolithography System combining Thermal SPM and direct laser lithography in CNS
The first NanoFrazor Explore DLS will arrive at CNS in early April 2019. Harvard is one of the beta-testing sites for the new instrument, so CNS users get the chance to exploit the advanced features as early as possible. Beta testing of the NanoFrazor Explore DLS will kick off with a webinar for prospective users, introducing the fundamentals and the possibilities of the tool. The webinar will take place on March, 27th at 10 AM EST (https://global.gotomeeting.com/join/424882261) Attendees of the webinar can sign up for training at the tool. Researchers are invited to contact the SwissLitho team with inquiries at any time to get application-specific support directly from the developers of the technology.
After the installation, the NanoFrazor Explore DLS can be used by all CNS users and on-site trainings are offered. To further strengthen the knowledge of its tSPL technology and possibilities for cutting-edge device fabrication, we also will hold a seminar/workshop on May, 2nd (with Prof. Riedo* from NYU as a key speaker).
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Research Experience for Undergraduates (REU)
Research Experience for Undergraduates (REU) opportunities at the School of Engineering and Applied Sciences (SEAS): Spend your summer at Harvard University performing cutting-edge research in world-class laboratories. Focus on an in-depth research project while exploring multidisciplinary research topics and honing your science communication skills. Participants are part of a large, diverse research community, and benefit from organized and informal interactions with students, mentors, and faculty. We provide a focused effort for mentoring and training undergraduates in several exciting branches of science and engineering, including biomaterials, materials science, nanotechnology, robotics, computer science, and energy and the environment. We are seeking undergraduates from chemistry, physics, biology, computer science, mathematics (applied and pure), statistics, and engineering. Students without prior research experience, including freshman and sophomore students, are especially encouraged to apply. For more information, see here.
[+MORE]Hybrid Nanolithography System combining Thermal SPM and direct laser lithography in CNS
Thermal scanning probe lithography (tSPL) uses heated ultrasharp tips to write nanometer-scale structures by evaporating the resist. Commercialized by SwissLitho in 2014 under the name NanoFrazor, this technology has matured, and now enables researchers all over the world to avoid obstacles inherent to the conventional nanolithography tools. Many devices with novel geometries and unprecedented quality are produced using NanoFrazor, leading to interesting research results reported in many high impact publications. The NanoFrazor is a versatile tool for micro- and nanotechnology thanks to the high resolution and markerless overlay capabilities without exposing the sample to charged particle beams like electrons or ions. The NanoFrazor Explore DLS combines thermal scanning probe lithography with direct laser sublimation (DLS) – an add-on to speed up the microlithography process patterning of larger features. SwissLitho teamed up with Heidelberg Instruments to develop the integrated laser and the optics. The Harvard’s Center for Nanoscale Systems (CNS) will be the first facility to receive such a new hybrid system. CNS already has a positive experience as a beta site for new products from Heidelberg Instruments. In 2015, the CNS has acquired the MLA150, which quickly became an important workhorse for almost all users. As a result of the successful collaboration between CNS and Heidelberg, the MLA150 has been installed in many research facilities and even in production settings, replacing conventional mask aligners and eliminating the need for masks at all. What makes NanoFrazor Explorer DLS stand out, in addition to the range and precision of its operation, is in-situ imaging during the writing process and the Closed Loop Lithography approach. Thanks to that, 3-dimensional nanostructures can be implemented with single nanometer precision. Also, there is no need to use wet chemistry for resist development, or to tediously correct for proximity effects like in electron beam lithography. NanoFrazor does not require vacuum since no focussed electrons or ions are used. These characteristics make the NanoFrazor an excellent tool for nanolithography on sensitive materials, in particular, for quick and precise patterning of the sample electrodes or etch masks on nanowires or 2D materials. Besides standard resist based nanolithography the hot tip of the NanoFrazor can be used to locally heat up any surface at the nanoscale, hence triggering local chemical reactions or phase changes. The first NanoFrazor Explore DLS will arrive at CNS in early April 2019. Harvard is one of the beta-testing sites for the new instrument, so CNS users get the chance to exploit the advanced features as early as possible. Beta testing of the NanoFrazor Explore DLS will kick off with a webinar for prospective users, introducing the fundamentals and the possibilities of the tool. The webinar will take place on March, 27th at 10 AM EST (https://global.gotomeeting.com/join/424882261) Attendees of the webinar can sign up for training at the tool. Researchers are invited to contact the SwissLitho team with inquiries at any time to get application-specific support directly from the developers of the technology. After the installation, the NanoFrazor Explore DLS can be used by all CNS users and on-site trainings are offered. To further strengthen the knowledge of its tSPL technology and possibilities for cutting-edge device fabrication, we also will hold a seminar/workshop on May, 2nd (with Prof. Riedo* from NYU as a key speaker). __________________________ *Zheng et al., Nature Electronics, 2,17–25 (2019)
March, 27th (10AM EST): Webinar NanoFrazor demo May, 2nd: Workshop/Seminar @CNS |
CNS 2018 Open House Poster Contest Winner
Congratulations to the winner of the 2018 CNS Open House Poster Contest: 1st Place - Xiao Yang, “Bioinspired neuron-like electronics for noninvasive brain probes”
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Masterclass in Imaging and Materials Characterization - Webinar Series: Intro to 3D Printing with Form Labs
May 06 12:00 pm - 1:00 pm
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Masterclass in Imaging and Materials Characterization - Webinar Series: Intro to Biological Sample Prep for EM
Apr 29 12:00 pm - 1:00 pm
Nicki Watson