The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Virtual Tour of CNS
The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
IMPORTANT ANNOUNCEMENT: Banner for important updates. To accommodate 1-2 lines of text. Is it possible for it to be switched on and off and easily changeable?
CNS Facilities
Two sites. Three exceptional research resources.


  • AJA SP-2 Sputtering System Training

    Oct 03 1:00 PM - 2:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom)

  • AJA SP-2 Sputtering System Training

    Oct 04 1:00 PM - 2:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom)

  • Cypher S/ES and MFP3d BiO Atomic Force Microscopy (AFM) Training Part-1 (SPM-2 & 6)

    Oct 05 3:00 PM - 4:00 PM

    Jason Tresback

    LISE B58

  • DOE-1 - ULVAC Deep Oxide Etcher

    Oct 06 3:30 PM - 4:30 PM

    Kenlin Huang

    in front of the tool, inside the G7 cleanroom.

  • ALD-3 PdR ALD System Training

    Oct 11 2:00 PM - 3:00 PM

    Mughees Khan

    PVD Bay (last bay in cleanroom); small red and white instrument on far wall

View Calendar


30 Sep, 2022

CNS Open House October 27th 2022

The CNS open house and poster session will be held 2pm- 4:30pm on October 27th 2022 at the LISE ground floor. Refreshments will be provided, there will be a "gift" for the best poster, and lab swag will be available. Send poster abstracts to by 10/24/22.


14 Sep, 2022

Correlative Surface Analysis Workshop at Harvard CNS (Oct 4th-5th, 2022)

Correlative Surface Analysis Workshop– Latest developments in XPS and related tools for materials analysis 

Center for Nanoscale Systems Harvard University
October 4th from 9am – 3pm to October 5th from 9am – 12pm EDT

There are many ways to analyze the composition of a material, however the best results are found by collecting information from multiple avenues. In this LIVE workshop, we will focus on the latest developments in multi-technique surface analysis, particularly X-ray Photoelectron Spectroscopy (XPS) and Scanning Electron Microscopy with Energy Dispersive X-ray Spectroscopy (SEM/EDS). We will discuss the latest developments for these instruments, and how datasets from both techniques combine to give a more complete understanding of a sample.   

This workshop will introduce our new “CISA,” Correlated Imaging for Surface Analysis workflow, for combining the capabilities of XPS and SEM.  The first day of the workshop will include talks from local scientistsusing XPS including Thermo Fisher Scientific product specialists, Dr. James Lallo and Dr. Hugues Francois Saint-Cyr.

Robust interpretation of XPS results is as critical as the quality of the raw data.  The second day of the workshop will focus on XPS data interpretation and reporting through live guided tutorial.  Dr. Tim Nunney will provide instruction on XPS data reduction using the Thermo Scientific AVANTAGE™ software.  Example data sets and trial copies of the new AVANTAGE™ Version 6 will be provided to attendees of the tutorial. 


Day 1 Full day - Speakers
Dr. James Lallo Thermo Fisher Scientific, Advances in XPS capabilities, and introduction of Correlated Imaging for Surface Analysis (CISA) 
Dr. Jennifer Lee - Harvard University 
Professor Xin Li - Harvard University SEAS
Kevin Hauser - Harvard University
Professor Elizabeth Landis - Holy Cross College
Dr. Hugues G. Francois Saint-Cyr - Thermo Fisher Scientific, Advances in integrated SEM-EDS


Day 2 Half day - Workshop
Educational Tutorial– XPS data analysis using Avantage V6 software
Dr. Robin Simpson, Thermo Fisher Scientific


Center for Nanoscale Systems Harvard University
11 Oxford St, Cambridge, MA 02138

Register here


08 Aug, 2022

Microelectronics/Semiconductor Research Community Virtual Workshop

September 8 and 9, 2022 / 12pm – 3:30pm EDT

In response to the recent efforts of the federal government to bolster US semiconductor manufacturing under the auspices of the CHIPS Act, the NSF NNCI is organizing a two-day online workshop to examine how the NNCI can address various components of the CHIPS initiative. The anticipated outcome of this workshop will be a report that could inform CHIPS funding as it relates to USICA, NSTC, NAMP and the Microelectronics Commons, as well as NSF Engines and FuSe. The workshop will combine invited talks by leading researchers in academia and industry with panel discussions to develop concrete action items to address the CHIPS initiative.




15 Jun, 2022

The 12th CNS-Nanofabrication Summer School

CNS Nanofabrication Team will continue offering a series of tutorials on nanofabrication technologies in this summer. Two tutorials every week will cover the fundamentals of each nanofabrication technology. The operation principles, process tips/tricks, and related frontier research and applications will be discussed. All CNS users are eligible to attend.
Certificate will be awarded to any attendee who takes more than 7 courses!!

Jun 21 Introduction of Nanofabrication JD Deng
Jun 24 Photolithography Guixiong Zhong
Jun 28 E-beam Lithography (EBL) and beyond Yuan Lu
July 5 Advanced Laser Writing Technologies Heidelberg Ins.
July 8 Reactive Ion Etch (RIE) Ling Xie
July 12 ALE- CNS Seminar II Oxford Corp.
July 15 Thin Film Growth - (CVD-PVD-ALD) Mughees Khan
July 19 Die Bonding Methods and Materials - Finetech & Indium
July 22 Metrology for Nanofabrication Jason Tresback
July 26 MEMS process and Packaging Guixiong Zhong

Location and Time: 100 Geological Lecture Hall, 24 Oxford St., Cambridge MA,
02138, Tuesday/ Friday, 12:00-1:30pm, Pizza lunch is available.

The agenda may be changed according to staff’s availability.
Contact Ling Xie:; Jiangdong Deng:


Directors Welcome

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research a


Overview Video

Quick links