The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
Virtual Tour of CNS
The Center for Nanoscale Systems is a shared use core facility at Harvard University. Our scientific focus is the study, design, and fabrication of nanoscale structures and their integration into large and complex interacting systems.
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CNS Facilities
Two sites. Three exceptional research resources.


  • Sharon TE-3, 4, and 5 Thermal Evaporator Training

    Oct 07 3:30 PM - 5:00 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom), PVD Bay

  • AJA SP-2 Sputtering System Training

    Oct 11 1:00 PM - 2:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom)

  • RIE-13 - Oxford PlasmaPro 100 Cobra 300

    Oct 12 3:00 PM - 4:00 PM

    Kenlin Huang

    In front of the tool, inside the G7 cleanroom.

  • ALD-2 GEMStar ALD Training

    Oct 13 9:00 AM - 10:00 AM

    Mughees Khan

    Wet Processing Bay - CNS cleanroom

  • AJA SP-2 Sputtering System Training

    Oct 17 1:00 PM - 2:30 PM

    Ed Macomber

    LISE G07 (CNS Cleanroom)

View Calendar


03 Oct, 2022

NNCI Webinar: Innovation and Entrepreneurship

Lab-to-fab: Transitioning from University Cleanrooms to Industrial Prototyping and Low-Volume Production.

October 12, 2022 | 3:00 p.m. - 4:00 p.m. ET

Abstract: Emerging semiconductor technologies face many challenges in transitioning from initial technology demonstrations to successful products. This talk will discuss an important initial step of transitioning technologies from a university cleanroom into industrial prototyping and low-volume production necessary for initial product sampling. Lessons learned and best-practices for easing this transition will be shared based on Teledyne Scientific Company’s experience providing cleanroom fabrication and prototyping services for external customers across a range of non-CMOS technologies. Examples of challenges and successes in process transfer will be provided. Paths for improving the connection between academic and industrial fabs will be considered, as will the transition from prototyping into higher volume production.

October 12, 2022 | 3:00 p.m. - 4:00 p.m. ET

Bio: Miguel Urteaga received his M.S. and Ph.D. degrees in Electrical Engineering from the University of California Santa Barbara in 2001 and 2003, respectively. He is currently the Director of Foundry Products and Services for Teledyne Scientific Company (TSC) and manages the advanced device development group. His research has focused on the development of ultra-high speed transistor technologies, primarily in the InP material system. In his current role, Dr. Urteaga is responsible for TSC’s integrated circuit Foundry offerings and interfaces with external customers for cleanroom fabrication and prototyping services. He has authored or co-authored over 200 conference and journal publications.
Miguel Urteaga | Director of Foundry Products and Services
Teledyne Scientific Company
Hosted by Andrew Lingley (Montana State University)

Access the event at


30 Sep, 2022

CNS Open House October 27th 2022

The CNS open house and poster session will be held 2pm- 4:30pm on October 27th 2022 at the LISE ground floor. Refreshments will be provided, there will be a "gift" for the best poster, and lab swag will be available. Send poster abstracts to by 10/24/22.


14 Sep, 2022

Correlative Surface Analysis Workshop at Harvard CNS (Oct 4th-5th, 2022)

Correlative Surface Analysis Workshop– Latest developments in XPS and related tools for materials analysis 

Center for Nanoscale Systems Harvard University
October 4th from 9am – 3pm to October 5th from 9am – 12pm EDT

There are many ways to analyze the composition of a material, however the best results are found by collecting information from multiple avenues. In this LIVE workshop, we will focus on the latest developments in multi-technique surface analysis, particularly X-ray Photoelectron Spectroscopy (XPS) and Scanning Electron Microscopy with Energy Dispersive X-ray Spectroscopy (SEM/EDS). We will discuss the latest developments for these instruments, and how datasets from both techniques combine to give a more complete understanding of a sample.   

This workshop will introduce our new “CISA,” Correlated Imaging for Surface Analysis workflow, for combining the capabilities of XPS and SEM.  The first day of the workshop will include talks from local scientistsusing XPS including Thermo Fisher Scientific product specialists, Dr. James Lallo and Dr. Hugues Francois Saint-Cyr.

Robust interpretation of XPS results is as critical as the quality of the raw data.  The second day of the workshop will focus on XPS data interpretation and reporting through live guided tutorial.  Dr. Tim Nunney will provide instruction on XPS data reduction using the Thermo Scientific AVANTAGE™ software.  Example data sets and trial copies of the new AVANTAGE™ Version 6 will be provided to attendees of the tutorial. 


Day 1 Full day - Speakers
Dr. James Lallo Thermo Fisher Scientific, Advances in XPS capabilities, and introduction of Correlated Imaging for Surface Analysis (CISA) 
Dr. Jennifer Lee - Harvard University 
Professor Xin Li - Harvard University SEAS
Kevin Hauser - Harvard University
Professor Elizabeth Landis - Holy Cross College
Dr. Hugues G. Francois Saint-Cyr - Thermo Fisher Scientific, Advances in integrated SEM-EDS


Day 2 Half day - Workshop
Educational Tutorial– XPS data analysis using Avantage V6 software
Dr. Robin Simpson, Thermo Fisher Scientific


Center for Nanoscale Systems Harvard University
11 Oxford St, Cambridge, MA 02138

Register here


08 Aug, 2022

Microelectronics/Semiconductor Research Community Virtual Workshop

September 8 and 9, 2022 / 12pm – 3:30pm EDT

In response to the recent efforts of the federal government to bolster US semiconductor manufacturing under the auspices of the CHIPS Act, the NSF NNCI is organizing a two-day online workshop to examine how the NNCI can address various components of the CHIPS initiative. The anticipated outcome of this workshop will be a report that could inform CHIPS funding as it relates to USICA, NSTC, NAMP and the Microelectronics Commons, as well as NSF Engines and FuSe. The workshop will combine invited talks by leading researchers in academia and industry with panel discussions to develop concrete action items to address the CHIPS initiative.




Directors Welcome

The Center for Nanoscale Systems (CNS) at Harvard University was created with a very clear vision: To provide a collaborative multi-disciplinary research environment to support of the creation and evolution of world-class nanoscience and technical expertise, for the Harvard research community as well as the larger community of external researchers both from academia and industry.

Our Core Values:

Facilitating leading-edge, multi-disciplinary, research a


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